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3-G3300-XX規(guī)格書詳情
General Description
GYPRO? product line is an established family of Micro-Electro-Mechanical Systems (MEMS) angular rate sensor specifically designed for demanding applications.
The MEMS transducer is manufactured using Tronics proprietary vacuum wafer-level packaging technology based on micro-machined thick single crystal silicon.
The integrated circuit (IC) provides a stable primary anti-phase vibration of the ‘drive’ proof masses, thanks to electrostatic comb drives. When the sensor is subjected to a rotation, the Coriolis force acts on the ‘sense’ proof masses and forces them into a secondary anti-phase movement perpendicular to the direction of drive vibration, which is itself counter-balanced by electrostatic forces. The sense closed loop operates as an electromechanical ΣΔ modulator providing a digital output. This output is finally demodulated using the drive reference signal.
The sensor is factory calibrated and compensated for temperature effects to provide high-accuracy digital output over a broad temperature range.
Raw data output can be also chosen to enable customer-made compensations.
Features
? Digital angular rate sensor with SPI interface
? Angular rate measurement around Z-axis (yaw)
? ±300°/sec input range
? Ultra low noise
? Excellent bias instability
? 24 bit angular rate output
? Embedded temperature sensor for on-chip or external temperature compensation
? Built-in Self-Test
? 5V single supply voltage
? Low operating current consumption: 25mA
? CLCC 30 package: 19.6 mm x 11.5 mm x 2.9 mm
? Weight : 2 grams
? REACH and RoHS compatible
Applications
? Precision instrumentation
? Platform stabilization and control
? Unmanned aerial vehicles
