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A192-80M-0215中文資料ETC數據手冊PDF規(guī)格書

A192-80M-0215
廠商型號

A192-80M-0215

功能描述

200 MM PROCESS WAFER CARRIERS

文件大小

781.87 Kbytes

頁面數量

4

生產廠商 List of Unclassifed Manufacturers
企業(yè)簡稱

ETC

中文名稱

未分類制造商

原廠標識
數據手冊

下載地址一下載地址二

更新時間

2025-1-14 17:56:00

A192-80M-0215規(guī)格書詳情

Features

? One-half the volume and mass of traditional

process carriers

? One-fourth the surface area of traditional process

carriers

? Modular construction includes reinforcement

rods for added rigidity and strength

? Lift points on carrier ends for automated

handling

? V-notch locators on carrier ends and rails for

location on equipment

? Wafer capacity: 50

? Pocket spacing: 6.4 mm (0.25)

Traditional Process

Wafer Carriers

Features

? Low and high profile

? “H” bar for equipment interface

? Locating track notches at the center of the

thirteenth pocket

? Pins and holes on the top rail (unless noted)

? Wafer capacity: 25, 26 or 50

? D1 dimension: 25.4 mm (1.00)

? Pocket spacing: A192-82M: 3.2 mm (0.13)

All others: 6.4 mm (0.25)

? Pocket flat: 1.7 mm (0.07)

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